Conference Paper Improvement of the nucleation density and orientation of diamond nuclei on 3C-SiC/Si Substrates by using high-power density plasma

矢板, 潤也  ,  Yaita, Junya  ,  岩崎, 孝之  ,  Iwasaki, Takayuki  ,  波多野, 睦子  ,  Hatano, Mutsuko

2015-05

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