Conference Paper Large Scale Deposition of DLC Films at Sub-atmospheric Pressure

舩橋, 輝  ,  Funahashi, Akira  ,  髙村, 瞭太  ,  Takamura, Ryota  ,  稗田, 純子  ,  Hieda, Junko  ,  赤坂, 大樹  ,  Akasaka, Hiroki  ,  大竹, 尚登  ,  OHTAKE, NAOTO

2015-09 , Japanese Society of Tribologists

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