Conference Paper A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology

山根, 大輔  ,  Yamane, Daisuke  ,  小西, 敏文  ,  Konishi, Toshifumi  ,  年吉, 洋  ,  Toshiyoshi, Hiroshi  ,  益, 一哉  ,  Masu, Kazuya  ,  町田, 克之  ,  Machida, Katsuyuki

2015-09

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