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Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers |
, 寺西, 美波 , Teranishi, Minami , TSO-FU, MARK CHANG , Chang, Mark , 陳, 君怡 , Chen, Chun Yi , 小西, 敏文 , Konishi, Toshifumi , 町田, 克之 , Machida, Katsuyuki , Toshiyoshi, Hiroshi , 山根, 大輔 , Yamane, Daisuke , 益, 一哉 , Masu, Kazuya , 曽根, 正人 Sone, Masato
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