Conference Paper A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology

山根, 大輔  ,  Yamane, Daisuke  ,  小西, 敏文  ,  Konishi, Toshifumi  ,  寺西, 美波  ,  Teranishi, Minami  ,  TSO-FU, MARK CHANG  ,  Chang, Mark  ,  陳, 君怡  ,  Chen, Chun Yi  ,  Toshiyoshi, Hiroshi  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato  ,  町田, 克之  ,  Machida, Katsuyuki

2015-09

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