Journal Article Rapid fabrication technique of nano/microfluidic device with high mechanical stability utilizing two-step soft lithography

茂木, 克雄  ,  Mogi, Katsuo  ,  杉井, 康彦  ,  Sugii, Yasuhiko  ,  山本, 貴富喜  ,  Yamamoto, Takatoki  ,  藤井, 輝夫  ,  Teruo, Fujii

Description
We established a rapid fabrication technique utilizing two-step soft lithography to realize rigid nano/microfluidic devices which have high mechanical and thermal stability, good chemical resistance and replication accuracy. The proposed technique enables the production of rigid nano/micro structures including inlet and outlet ports by utilizing a mold master made from a soft material, conveniently and inexpensively. A device made from a thermosetting epoxy resin instead of a hard material showed a high replication accuracy, even with a high-aspect-ratio micro structure, and demonstrated sufficient mechanical stability at pressures exceeding 0.4 MPa. It is possible to realize the nano/microfluidic devices with high aspect ratios, high depth, and low surface roughness, such as nano-dot arrays, well structures, nano/micro channels, and other small and/or precise structures. Rapid fabrication technique of nano/microfluidic device with high mechanical stability utilizing two-step soft lithography - ResearchGate. Available from: http://www.researchgate.net/publication/273654879_Rapid_fabrication_technique_of_nanomicrofluidic_device_with_high_mechanical_stability_utilizing_two-step_soft_lithography [accessed Jun 22, 2015].

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