Journal Article Nanoscale Three-dimensional Optical Visualization Method for a Deformation of Elastomer Printing Plate to Realize Soft Nano-printing Technology

橋本, 優生  ,  Hashimoto, Yuki  ,  茂木, 克雄  ,  Mogi, Katsuo  ,  山本, 貴富喜  ,  Yamamoto, Takatoki

47 ( No. 6 )  , pp.723 - 727 , 2015-06 , John Wiley & Sons, Ltd
Description
Printed electronics, in which microcircuit patterns are fabricated using printing methods, are the focus of considerable attention for the fabrication of devices such as flat panel displays, solar cells, and flexible electronics. In particular, gravure offset printing is considered to be a highly promising approach for rapid printing of fine patterns with well-controlled thickness. At present, however, because of the occurrence of side etching during fabrication of metal printing plates, features with dimensions of less than 10 µm cannot be printed. In order to overcome this problem, we have previously proposed the use of a rubber printing plate fabricated by photolithography and molding, which is free from side-etching issues. However, deformation of the printing plate can have a detrimental influence on the transferred pattern. In the present study, we developed a method for visualizing the deformation of a printing plate containing both micropatterns and nanopatterns, in order to study its effect on the printing process. The results were compared with those predicted by an analytic equation under a uniform controlled pressure.

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