Journal Article Expansion of the difference-field boundary element method for numerical analyses of various local defects in periodic surface-relief structures

Sugisaka, Jun-ichiro  ,  Yasui, Takashi  ,  Hirayama, Koichi  ,  杉坂, 純一郎  ,  安井, 崇  ,  平山, 浩一

32 ( 5 )  , pp.751 - 763 , 2015-05 , Optical Society of America
We expand the difference-field boundary element method (DFBEM) to calculate wave scattering from a variety of local periodic structure defects. The DFBEM is a numerical method for simulating the diffraction caused by a periodic surface-relief structure with a defect. Although it is more efficient than conventional techniques such as the finite-difference time-domain (FDTD) method, the original DFBEM is limited to projection defects. Here, we derive the integral equations and expressions for crack and buried-pillar defects, and also demonstrate some numerical analyses, validating the results by comparison with results from the FDTD method and the dielectric interface boundary conditions.

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