Journal Article Efficient Scattering Analysis of Arbitrarily Shaped Local Defect in Diffraction Grating

SUGISAKA, Jun-ichiro  ,  YASUI, Takashi  ,  HIRAYAMA, Koichi  ,  杉坂, 純一郎  ,  安井, 崇  ,  平山, 浩一

E99.C ( 1 )  , pp.76 - 80 , 2016

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