In fusion devices with plasma-facing components manufactured from carbon-based materials, co-deposition of hydrogen isotopes and carbon takes place in regions where sputtering rate is relatively small. Fuel retention and recycling depend on properties of those deposits. Glow-discharge optical emission spectroscopy (GDOES) is one of attractive techniques to analyze chemical composition and thickness of these deposition layers. However, influence of hydrogen content on sputtering of these layers by glow-discharge plasma is not fully understood. In this study, two different types of carbon layer with quite different hydrogen content were deposited on stainless steel substrate, and sputtering rate during the GDOES measurement was examined for better interpretation of results obtained.