紀要論文 エアロゾル CVD 装置を用いた直接堆積による単層カーボンナノチューブ薄膜の作成とその物性評価

中野, 陸

57pp.1 - 2 , 2016-03-24 , 法政大学大学院理工学・工学研究科
ISSN:21879923
内容記述
The chemical vapor deposition (CVD) process, especially, the aerosol CVD, has attracted lots of attentions because there is a potential for the production of high purity of single-walled carbon nanotube (SWNT) at low cost. And it is known that the catalyst particle size affect to the diameter of SWNTs synthesis by CVD method. In this method, it needs to use the inert powder for efficient catalyst decomposition. In most of the previous studies, the synthesized SWNTs is corrected by iltrations. We made new aerosol CVD system, in which don’t need to use inert powder. Then we were synthesized SWNTs, and prepared a thin film by depositing them onto the substrate directly. Key Words : Single-walled carbon nanotubes, synthesis, aerosol, ferrocene
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http://repo.lib.hosei.ac.jp/bitstream/10114/12726/1/13R2119%e4%b8%ad%e9%87%8e%e9%99%b8.pdf

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