Departmental Bulletin Paper Si基板埋め込み100ミクロン平方全固体型リチウムイオン二次電池の試作
ONE HUNDRED MICRON SQUARED ALL-SOLID-STATE LI ION SECONDARY BATTERY EMBEDDED IN SILICON SUBSTRATE

内野, 将也  ,  UCHINO, Masaya

562015-03-24 , 法政大学大学院理工学・工学研究科
ISSN:21879923
NCID:AA12677220
Description
All-solid-state Li ion secondary battery, consisting of multiple layers (Li anode / a poly methacrylate acetate (PMMA) electrolyte / LiMn2O4 cathode), is prepared using Si very-large-scale integration technologies. The synthesized materials are characterized by means of X-ray diffraction (XRD) and Raman spectroscopy PMMA solid electrolyte containing LiClO4 for Li ion secondary battery is fabricated on Si-substrate by a sol-gel spin coating method. The film thickness of PMMA is controlled by number of times of spin coating. Battery operations are measured using the ten times of spin coatings with 100×100 μm2 in Si substrate. A specific capacity of 50 μAh/cm2 is obtained for the charge of 50 nA and discharge of 10 nA
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