ZnMgO films on glass substrate could be grown at low temperature (150oC) under nitrogen atmosphere. We used diethylzinc and dibutylmagnesium as started materials to grow ZnMgO films at low temperature. We examined annealing-temperature dependence of the samples by X-ray diffraction (XRD), optical transmittance, and Hall measurements. Peaks of the ZnMgO films could be observed in the XRD patterns. Absorption edge of ZnMgO shifted to higher energy region than that of ZnO by the optical transmittance spectrum. All samples had an average optical transmittance of more than 85%.