Research Paper 走査型プローブ顕微鏡技術を利用したナノ接合界面の形成と解析

富取, 正彦

本研究では、独自の走査型プローブ顕微鏡(SPM)技術(SEM―SPM、電圧印加非接触原子間力顕微鏡(nc-AFM)など)を発展させた。SEM-SPMを活用して、WO3粉担持の加熱した小型WフィラメントにW針を接近させてWOx突起を成長させる探針調製法、水晶振動子を基にした再調律2本プロング高感度力センサーの開発、極接近した探針と試料間の相互作用によるエネルギー損失の高感度測定を実施し、また、nc-AFMにチャージアンプを組み込み、探針-試料間の静電容量、接触電位差、電荷移動を原子レベルで観察・計測した。適用試料をπ共役系分子、酸化物超薄膜などへ広げ、原子レベルの表面・界面の科学技術に寄与した。 : We extended the performance of scanning probe microscopy (SPM) techniques developed with our bases, such as the combined instrument of SPM and scanning electron microscopy(SEM), and bias non-contact atomic force microscopy (nc-AFM). We carried out the followings: fabrication of SPM probes of WOx nanorods on W tips by bringing the tips closer to the source of WO3 powers supported on a W filament heated by use of the SEM-SPM setup; development of retuned two-prong quartz tuning forks for a high sensitivity force sensor; measurements of energy dissipation through the interaction between a tip and a sample; nanoscale electric measurements such as electric capacitance, contact potential difference, and charge transfer using a charge sensitive amplifier installed in the nc-AFM setup. We contributed to a scientific and technological field of surfaces and interfaces on atomic scale by applying them to π-conjugated molecules, and to the films and surfaces of oxides.

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