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書誌情報
ターボ分子真空ポンプ内流れの二次元数値シミュレーション
Numerical Simulation of Two Dimensional Flow in the Turbo Molecular Pump
67
(
661
)
, pp.2159
-
2165 , 2001-09-25 , 社団法人日本機械学会
ISSN:03875016
NII書誌ID(NCID):AN00187441
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その他の情報
| 著者キーワード |
Turbo Molecular Pump
Rarefied Gas Dynamics DSMC Vacuum Pump Molecular Flow |
| 内容記述 |
The flow field in the turbo-molecular pump is numerically analyzed by the Direct-Simulation-Monte-Carlo method. The two dimensional simulation shows these results : 1) Even at the steady state of the pump, some unsteady now exists at the area between the rotor and stator. 2) In the pump with a rotor stage and a stator stage, the relative velocity is not similar because of the boundary condition of discharge side. 3) The maximum pressure ratio is effected by the time-averaged flow in the pump. 4) Intermolecular collision makes the maximum pressure ratio small at Kn < 10, but the discharge time is not affected by the molecular collision. 5) In the pump with many stages, the flow becomes almost similar when the shape of blades are same.
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| 公開者 |
社団法人日本機械学会
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| 国立情報学研究所 メタデータ主題語彙集（資源タイプ） |
Journal Article
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| フォーマット |
application/pdf
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| 言語 |
jpn
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| 著者版フラグ |
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