Journal Article High-density formation of Ta nanodot induced by remote hydrogen plasma

Miyazaki, Seiichi  ,  Makihara, Katsunori  ,  Ikeda, Mitsuhisa  ,  Ohta, Akio  ,  Takeuchi, Daichi  ,  Wang, Yaping

56 ( 1S )  , p.01AE01 , 2017-01 , IOP publishing
ISSN:0021-4922
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