Thesis or Dissertation Study on atomic-scale plasma process based on substrate-temperature control by frequency-domain low-coherence interferometry

堤, 隆嘉  ,  TSUTSUMI, Takayoshi

2015-03-25
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http://ir.nul.nagoya-u.ac.jp/jspui/bitstream/2237/22439/3/11042要旨.pdf

http://ir.nul.nagoya-u.ac.jp/jspui/bitstream/2237/22439/2/11042本文.pdf

http://ir.nul.nagoya-u.ac.jp/jspui/bitstream/2237/22439/1/11042結果.pdf

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