Thesis or Dissertation Studies on control of active species and design of gas molecules for etching of dielectric films in fluorocarbon and related-gas plasmas

近藤, 祐介  ,  KONDO, Yusuke

2015-03-25
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http://ir.nul.nagoya-u.ac.jp/jspui/bitstream/2237/22438/3/11041要旨.pdf

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